Publikation:
Optical Emission Spectroscopy for Plasma Diagnostics in Large Area PECVD Reactors for Thin Film Solar Cells
Datum
2013
Masterarbeit
Goury, C. (2013). Optical Emission Spectroscopy for Plasma Diagnostics in Large Area PECVD Reactors for Thin Film Solar Cells. https://orix.ost.ch/handle/20.500.14978/23035
Zusätzliche Indizierung
| Institution | Eastern Switzerland University of Applied Sciences (OST) |
|---|---|
| Studiengang | Mechatronics |
| Titel | Optical Emission Spectroscopy for Plasma Diagnostics in Large Area PECVD Reactors for Thin Film Solar Cells |
| Sprache | eng |
| Autor:in | Goury, Celine |
| Betreuer:in | |
| Projektpartner | TEL Solar |
| Datum der Veröffentlichung | 2013 |
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4 seit hinterlegt am 2026-10-08
Erwerbsdatum: 2026-10-14
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