Publikation:
Optical Emission Spectroscopy for Plasma Diagnostics in Large Area PECVD Reactors for Thin Film Solar Cells
Datum
2013
Masterarbeit
| Institution | Eastern Switzerland University of Applied Sciences (OST) |
|---|---|
| Studiengang | Mechatronics |
| Titel | Optical Emission Spectroscopy for Plasma Diagnostics in Large Area PECVD Reactors for Thin Film Solar Cells |
| Sprache | eng |
| Autor:in | Goury, Celine |
| Betreuer:in | |
| Projektpartner | TEL Solar |
| Datum der Veröffentlichung | 2013 |