Publikation:
Reactive Sputtering of Doped Gallium Nitride from a Liquid Target
Datum
2021
Masterarbeit
Loretz, P. (2021). Reactive Sputtering of Doped Gallium Nitride from a Liquid Target. https://orix.ost.ch/handle/20.500.14978/22970
Zusätzliche Indizierung
| Institution | Eastern Switzerland University of Applied Sciences (OST) |
|---|---|
| Studiengang | Engineering with specialization in Photonics |
| Titel | Reactive Sputtering of Doped Gallium Nitride from a Liquid Target |
| Sprache | eng |
| Autor:in | Loretz, Patrick |
| Betreuer:in | |
| Projektpartner | Evatec AG |
| Datum der Veröffentlichung | 2021 |
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